Model H94-17G Single-side Mask Aligner

Main Application This machine is used to develop and manufacture medium and small-scale integrated circuits,semiconductor devices, photoelectronic device and sonic surface components. Main Structure It consists of high degree of accuracy aligning worktable, binocular field-spitting microscope (or CCD micrographic display system), phtotohead, pneumatic system, vacuum pipeline system, monoblock vacuum pump, vibration- resistance worktable and accessories case, etc..

Main Functional Characteristics 1.Wide Application      It is used to photo-etch all kinds of substrates with iameter below 100mm  and  thickness below 5mm, including noncircular bstrates. 2.Advanced Structure      Air float levelling mechanism; Vacuum seal mechanism which realizes vacuum hard-contact, soft-contact and small-force contact; Vacuum mask frame and vacuum slide sucker. 3.Handy Manipulation      It fetches and places the substrate by turning over the plate. By pressing the buttons, it realizes vacuum sorption of mask, substrate, floating ball,and scan lock. It’s very simple and convenient to manipulate, debug，maintain and repair. 4.High Reliability      It adopts imported electromagnetic valve, button and timer. With unique pneumatic system, vacuum pipeline system and precision machining of parts, the system equips with high reliability. 5.Special Function of Processing Fragments      It solves the problem that mask and substrate can’t be aligned because of adhesion between them, which is caused by noncircular substrates, fragments and uneven bottom surface of substrates.

Main specifications ●Finest Exposure line: 1.5μm ●Alignment Precision: 1μm ●Mode of Fixing the mask and substrate: vacuum sorption ●Micropositioner Maximum Shift     Range X,Y: ±4mm ●Micropositioner Scan Range X,Y:±20mm ●Maximum Swing Angle of load    Bearing Platform: 90°    Maximum Height of Elevating: 5mm ●Parallel and Uniform Source of  light Diameter of Outgoing lightbeam:≥115mm   Non-parallelism of light:≤±6°   Ununiformityof light:≤±5%   200-watt Mercury lamp started by   directcurrent, fan-cooling ●BinocularField-spitting Microscope    ( or CCD micrographic display    system)MagnificationTimes: 30×-375× DoubleObjective lens Distance:     20-69mm ●Power:    Compressedair:≥3.5kg    Voltage:AC220V/50Hz    Power:1000W ●OverallDimensions: 918×680×1300(L×W×H) ●Weight:160kg Vacuum sorption framework X,Y Scan Structure Air-float levelling mechanism