Vacuum Exhausting Unit
Application: It is used for the vacuum exhausting of electrical vacuum devices such as permatron, traveling wave tube, gyrotron and klystron.  Main Structure and Operation Mode Manually loading Vertical, single head, multiple head Mainframe and control cabinet are set up separately.  Main Specifications: Ultimate Vacuum: 1.3x10-7 Baking Box Vacuum: 9x10-1 Operating Space of Baking Box: φ300x100 Maximum Temperature: 600℃ Working Temperature: 550℃ Temperature Uniformity: ±15℃ Pumping Speed: 400L/S Total Power: 15KW Heating Power: 12KW Heating Method: internally heated Instruction: The products can be specially designed to meet the clients’ different demands of effective volume, maximum temperature, ultimate vacuum and exhaust head.
Main specifications: Model Effective Volume (mm) Maximum Temperature (℃) Temperature Uniformity (℃) Ultimate Vacuum(Pa) Power (Kw) Process layout P431-2 Φ1000×1000 200 ±5 5×10-5 8 Single head P431-3 Φ300×1000 600 ±15 1.3×10-7 15 Single head P431-4 Φ360×1000 600 ±15 9×10-8 15 Double heads P431-5 Φ460×500 600 ±5 3×10-7 12 Single head P431-6 Φ500×1200 600 ±15 9×10-8 15 Double heads P431-7 Φ680×700 600 ±15 1×10-5 20 Four heads P431-8 Φ700×700 600 ±5 1×10-5 20 Single head P431-9 Φ500×1200 650 ±10 5×10-6 15 Single head P431-10 Φ850×1100 680 ±15 5×10-6 22 Six heads P431-11 Φ550×1000 600 ±10 8×10-2 20 双工位 P431-12 Φ800×1400 600 ±15 7×10-8 70 双工位 P431-13 Φ1000×2400 600 ±25 7×10-8 180 三工位